VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Copper: Cu(2p3) & Cu(2p1), BE Cu(2p3) = 932.62 eV
1
0.05 eV/step, Sum of 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 15 repetitive etch/scans
Copper: Cu(2p3) & Cu(2p1), BE Cu(2p3) = 932.62 eV
2003
4
25
22
10
13
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.3
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
970
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
40
4.00E-06
0
0
0
0
2002
0
47260
0.594123
0.622211
3405
0.622211
3253
0.622181
3426
0.622151
3420
0.622121
3251
0.622091
3223
0.622061
3376
0.622031
3320
0.622
3379
0.62197
3364
0.62194
3401
0.62191
3491
0.62188
3377
0.62185
3300
0.62182
3369
0.62179
3341
0.62176
3431
0.62173
3426
0.6217
3371
0.62167
3463
0.62164
3480
0.62161
3494
0.62158
3309
0.62155
3468
0.62152
3389
0.62149
3482
0.62146
3282
0.62143
3553
0.6214
3384
0.62137
3348
0.62134
3454
0.62131
3384
0.62128
3335
0.62125
3407
0.62122
3475
0.62119
3325
0.62116
3356
0.62113
3331
0.6211
3437
0.62107
3430
0.62104
3466
0.62101
3437
0.62098
3538
0.62095
3459
0.62092
3445
0.62089
3356
0.620861
3382
0.620831
3506
0.620801
3454
0.620771
3608
0.620741
3442
0.620711
3487
0.620681
3439
0.620651
3305
0.620621
3509
0.620592
3373
0.620562
3398
0.620532
3414
0.620502
3523
0.620472
3578
0.620442
3486
0.620412
3606
0.620382
3493
0.620353
3402
0.620323
3451
0.620293
3489
0.620263
3499
0.620233
3557
0.620203
3430
0.620174
3533
0.620144
3556
0.620114
3493
0.620084
3505
0.620054
3620
0.620025
3536
0.619995
3623
0.619965
3660
0.619935
3479
0.619906
3621
0.619876
3547
0.619846
3379
0.619816
3620
0.619786
3734
0.619757
3630
0.619727
3585
0.619697
3552
0.619667
3760
0.619638
3612
0.619608
3693
0.619578
3636
0.619548
3722
0.619519
3767
0.619489
3842
0.619459
3619
0.61943
3502
0.6194
3741
0.61937
3682
0.619341
3744
0.619311
3583
0.619281
3652
0.619251
3755
0.619222
3808
0.619192
3612
0.619162
3747
0.619133
3689
0.619103
3652
0.619073
3739
0.619044
3750
0.619014
3672
0.618984
3691
0.618955
3632
0.618925
3590
0.618896
3835
0.618866
3687
0.618836
3840
0.618807
3755
0.618777
3732
0.618747
3653
0.618718
3788
0.618688
3617
0.618659
3721
0.618629
3530
0.618599
3572
0.61857
3529
0.61854
3614
0.618511
3684
0.618481
3556
0.618452
3735
0.618422
3709
0.618392
3556
0.618363
3716
0.618333
3642
0.618304
3574
0.618274
3528
0.618245
3522
0.618215
3667
0.618186
3658
0.618156
3477
0.618127
3697
0.618097
3535
0.618068
3255
0.618038
3554
0.618008
3547
0.617979
3405
0.617949
3498
0.61792
3468
0.617891
3560
0.617861
3496
0.617832
3424
0.617802
3309
0.617773
3433
0.617743
3422
0.617714
3407
0.617684
3408
0.617655
3381
0.617625
3459
0.617596
3421
0.617566
3420
0.617537
3605
0.617508
3411
0.617478
3423
0.617449
3287
0.617419
3336
0.61739
3472
0.61736
3397
0.617331
3482
0.617302
3245
0.617272
3281
0.617243
3430
0.617213
3423
0.617184
3404
0.617155
3399
0.617125
3532
0.617096
3538
0.617066
3414
0.617037
3517
0.617008
3536
0.616978
3381
0.616949
3399
0.61692
3489
0.61689
3467
0.616861
3453
0.616832
3518
0.616802
3514
0.616773
3496
0.616744
3559
0.616714
3346
0.616685
3377
0.616656
3440
0.616626
3454
0.616597
3478
0.616568
3350
0.616539
3432
0.616509
3413
0.61648
3497
0.616451
3328
0.616421
3453
0.616392
3495
0.616363
3569
0.616334
3393
0.616304
3485
0.616275
3422
0.616246
3554
0.616217
3490
0.616187
3519
0.616158
3486
0.616129
3650
0.6161
3500
0.61607
3533
0.616041
3500
0.616012
3473
0.615983
3495
0.615953
3542
0.615924
3564
0.615895
3453
0.615866
3483
0.615837
3493
0.615807
3540
0.615778
3746
0.615749
3552
0.61572
3517
0.615691
3620
0.615662
3426
0.615632
3579
0.615603
3449
0.615574
3380
0.615545
3477
0.615516
3550
0.615487
3723
0.615457
3489
0.615428
3480
0.615399
3382
0.61537
3443
0.615341
3448
0.615312
3381
0.615283
3483
0.615254
3493
0.615224
3700
0.615195
3520
0.615166
3501
0.615137
3585
0.615108
3702
0.615079
3520
0.61505
3602
0.615021
3620
0.614992
3358
0.614963
3505
0.614934
3491
0.614905
3589
0.614875
3513
0.614846
3495
0.614817
3560
0.614788
3739
0.614759
3765
0.61473
3564
0.614701
3660
0.614672
3617
0.614643
3762
0.614614
3673
0.614585
3594
0.614556
3681
0.614527
3652
0.614498
3735
0.614469
3592
0.61444
3545
0.614411
3711
0.614382
3785
0.614353
3801
0.614324
3727
0.614295
3714
0.614266
3728
0.614237
3741
0.614208
3733
0.614179
3897
0.61415
3877
0.614121
3796
0.614092
3786
0.614063
3803
0.614034
3901
0.614006
3815
0.613977
3800
0.613948
3872
0.613919
3763
0.61389
3763
0.613861
3825
0.613832
3802
0.613803
3953
0.613774
3891
0.613745
3915
0.613716
3952
0.613688
3917
0.613659
3947
0.61363
4046
0.613601
4056
0.613572
4073
0.613543
4040
0.613514
4144
0.613485
4013
0.613457
4129
0.613428
4104
0.613399
4176
0.61337
4150
0.613341
4279
0.613312
4320
0.613283
4407
0.613255
4350
0.613226
4303
0.613197
4426
0.613168
4482
0.613139
4801
0.613111
4586
0.613082
4727
0.613053
4848
0.613024
4879
0.612995
4786
0.612967
4950
0.612938
5019
0.612909
5143
0.61288
5362
0.612851
5512
0.612823
5553
0.612794
5549
0.612765
5823
0.612736
5977
0.612708
5942
0.612679
6184
0.61265
6413
0.612621
6620
0.612593
6830
0.612564
7054
0.612535
7207
0.612506
7605
0.612478
7972
0.612449
8216
0.61242
8472
0.612392
8898
0.612363
9223
0.612334
9610
0.612305
10109
0.612277
10706
0.612248
11151
0.612219
11714
0.612191
12243
0.612162
12893
0.612133
13255
0.612105
13666
0.612076
14525
0.612047
15258
0.612019
15397
0.61199
15777
0.611961
15852
0.611933
16413
0.611904
16057
0.611875
16127
0.611847
15938
0.611818
15773
0.61179
15282
0.611761
14677
0.611732
14147
0.611704
13730
0.611675
12879
0.611647
12369
0.611618
11726
0.611589
11027
0.611561
10342
0.611532
9952
0.611504
9114
0.611475
8844
0.611446
8460
0.611418
7896
0.611389
7581
0.611361
7320
0.611332
6974
0.611304
6744
0.611275
6323
0.611246
6222
0.611218
6059
0.611189
5702
0.611161
5574
0.611132
5378
0.611104
5278
0.611075
5242
0.611047
4974
0.611018
4788
0.61099
4963
0.610961
4610
0.610933
4603
0.610904
4537
0.610876
4299
0.610847
4419
0.610819
4232
0.61079
4295
0.610762
4159
0.610733
3924
0.610705
3995
0.610676
3937
0.610648
3966
0.610619
3908
0.610591
3898
0.610563
3794
0.610534
3880
0.610506
3683
0.610477
3556
0.610449
3634
0.61042
3578
0.610392
3650
0.610363
3581
0.610335
3461
0.610307
3540
0.610278
3447
0.61025
3307
0.610221
3399
0.610193
3296
0.610165
3378
0.610136
3168
0.610108
3482
0.610079
3242
0.610051
3307
0.610023
3213
0.609994
3035
0.609966
3278
0.609938
3199
0.609909
3122
0.609881
3077
0.609852
3100
0.609824
3059
0.609796
3094
0.609767
3042
0.609739
2939
0.609711
3017
0.609682
3100
0.609654
2955
0.609626
3061
0.609597
3053
0.609569
3029
0.609541
3054
0.609513
3083
0.609484
3100
0.609456
2991
0.609428
3076
0.609399
3018
0.609371
2923
0.609343
2990
0.609314
2976
0.609286
3024
0.609258
2938
0.60923
2901
0.609201
2977
0.609173
2840
0.609145
2900
0.609117
3024
0.609088
2933
0.60906
2979
0.609032
2844
0.609004
2969
0.608975
2960
0.608947
2972
0.608919
3037
0.608891
3047
0.608863
3080
0.608834
3058
0.608806
2892
0.608778
3016
0.60875
2885
0.608722
3014
0.608693
3002
0.608665
3182
0.608637
3022
0.608609
3017
0.608581
2906
0.608552
3091
0.608524
3087
0.608496
3110
0.608468
3139
0.60844
3031
0.608412
2978
0.608383
2891
0.608355
2946
0.608327
2989
0.608299
3067
0.608271
3039
0.608243
3080
0.608215
3036
0.608187
3006
0.608158
3016
0.60813
2933
0.608102
2988
0.608074
3028
0.608046
3084
0.608018
3058
0.60799
2851
0.607962
2840
0.607934
2866
0.607906
2869
0.607877
2982
0.607849
2743
0.607821
2813
0.607793
2819
0.607765
2809
0.607737
2903
0.607709
2777
0.607681
2847
0.607653
2743
0.607625
2783
0.607597
2759
0.607569
2744
0.607541
2798
0.607513
2788
0.607485
2879
0.607457
2707
0.607429
2892
0.607401
2605
0.607373
2886
0.607345
2782
0.607317
2688
0.607289
2660
0.607261
2851
0.607233
2724
0.607205
2798
0.607177
2747
0.607149
2697
0.607121
2804
0.607093
2622
0.607065
2696
0.607037
2654
0.607009
2728
0.606981
2813
0.606953
2739
0.606925
2761
0.606897
2758
0.606869
2703
0.606841
2684
0.606813
2714
0.606785
2880
0.606757
2761
0.60673
2703
0.606702
2501
0.606674
2714
0.606646
2604
0.606618
2556
0.60659
2667
0.606562
2639
0.606534
2708
0.606506
2554
0.606478
2558
0.606451
2535
0.606423
2617
0.606395
2547
0.606367
2634
0.606339
2564
0.606311
2446
0.606283
2516
0.606255
2531
0.606228
2492
0.6062
2375
0.606172
2410
0.606144
2463
0.606116
2522
0.606088
2422
0.606061
2393
0.606033
2463
0.606005
2410
0.605977
2333
0.605949
2374
0.605922
2255
0.605894
2214
0.605866
2372
0.605838
2354
0.60581
2346
0.605783
2255
0.605755
2209
0.605727
2408
0.605699
2265
0.605671
2196
0.605644
2306
0.605616
2199
0.605588
2193
0.60556
2274
0.605533
2189
0.605505
2287
0.605477
2290
0.605449
2149
0.605422
2329
0.605394
2264
0.605366
2334
0.605338
2200
0.605311
2223
0.605283
2209
0.605255
2225
0.605228
2219
0.6052
2222
0.605172
2286
0.605144
2170
0.605117
2386
0.605089
2126
0.605061
2284
0.605034
2282
0.605006
2320
0.604978
2325
0.604951
2236
0.604923
2223
0.604895
2248
0.604868
2276
0.60484
2202
0.604812
2183
0.604785
2272
0.604757
2222
0.604729
2309
0.604702
2229
0.604674
2234
0.604646
2293
0.604619
2204
0.604591
2088
0.604564
2182
0.604536
2145
0.604508
2149
0.604481
2311
0.604453
2108
0.604425
2147
0.604398
2173
0.60437
2210
0.604343
2162
0.604315
2303
0.604288
2160
0.60426
2116
0.604232
2215
0.604205
2076
0.604177
2164
0.60415
2154
0.604122
2308
0.604095
2149
0.604067
2194
0.604039
2038
0.604012
2013
0.603984
2116
0.603957
2167
0.603929
2086
0.603902
2059
0.603874
2270
0.603847
2094
0.603819
2225
0.603792
2174
0.603764
2153
0.603737
2127
0.603709
2068
0.603682
2209
0.603654
2233
0.603627
2292
0.603599
2302
0.603572
2255
0.603544
2267
0.603517
2463
0.603489
2298
0.603462
2264
0.603434
2249
0.603407
2247
0.603379
2297
0.603352
2374
0.603324
2311
0.603297
2345
0.60327
2376
0.603242
2345
0.603215
2359
0.603187
2326
0.60316
2348
0.603132
2317
0.603105
2316
0.603078
2328
0.60305
2376
0.603023
2418
0.602995
2381
0.602968
2402
0.60294
2291
0.602913
2439
0.602886
2310
0.602858
2353
0.602831
2349
0.602804
2355
0.602776
2269
0.602749
2375
0.602721
2377
0.602694
2204
0.602667
2287
0.602639
2373
0.602612
2272
0.602585
2324
0.602557
2336
0.60253
2344
0.602503
2312
0.602475
2299
0.602448
2344
0.602421
2330
0.602393
2406
0.602366
2350
0.602339
2565
0.602311
2427
0.602284
2427
0.602257
2343
0.602229
2494
0.602202
2420
0.602175
2487
0.602147
2506
0.60212
2469
0.602093
2508
0.602066
2626
0.602038
2715
0.602011
2826
0.601984
2672
0.601957
2781
0.601929
2939
0.601902
3004
0.601875
3153
0.601847
3073
0.60182
3216
0.601793
3416
0.601766
3379
0.601739
3744
0.601711
3817
0.601684
4006
0.601657
4103
0.60163
4505
0.601602
4537
0.601575
4769
0.601548
5090
0.601521
5345
0.601494
5844
0.601466
6266
0.601439
6709
0.601412
7202
0.601385
7550
0.601358
8341
0.60133
9077
0.601303
9977
0.601276
11201
0.601249
12040
0.601222
13399
0.601195
15441
0.601167
17557
0.60114
19511
0.601113
22130
0.601086
24754
0.601059
27878
0.601032
31803
0.601005
35131
0.600977
38952
0.60095
42234
0.600923
45105
0.600896
46657
0.600869
47260
0.600842
46788
0.600815
44876
0.600788
42417
0.60076
38670
0.600733
35075
0.600706
31194
0.600679
27762
0.600652
24190
0.600625
20925
0.600598
18311
0.600571
16057
0.600544
14286
0.600517
12282
0.60049
10867
0.600463
9493
0.600435
8381
0.600408
7403
0.600381
6750
0.600354
5873
0.600327
5419
0.6003
5111
0.600273
4696
0.600246
4304
0.600219
4076
0.600192
3598
0.600165
3549
0.600138
3139
0.600111
3045
0.600084
2687
0.600057
2544
0.60003
2438
0.600003
2310
0.599976
2196
0.599949
2111
0.599922
1972
0.599895
1789
0.599868
1813
0.599841
1659
0.599814
1691
0.599787
1550
0.59976
1489
0.599733
1514
0.599706
1362
0.599679
1444
0.599652
1260
0.599625
1302
0.599598
1218
0.599571
1245
0.599545
1088
0.599518
1112
0.599491
1018
0.599464
1105
0.599437
900
0.59941
959
0.599383
869
0.599356
820
0.599329
851
0.599302
811
0.599275
799
0.599248
837
0.599222
703
0.599195
728
0.599168
729
0.599141
584
0.599114
635
0.599087
541
0.59906
573
0.599033
558
0.599006
659
0.59898
491
0.598953
592
0.598926
486
0.598899
473
0.598872
510
0.598845
484
0.598818
492
0.598792
493
0.598765
416
0.598738
386
0.598711
516
0.598684
399
0.598658
406
0.598631
437
0.598604
388
0.598577
355
0.59855
315
0.598523
292
0.598497
457
0.59847
345
0.598443
333
0.598416
228
0.59839
405
0.598363
280
0.598336
335
0.598309
264
0.598282
289
0.598256
313
0.598229
331
0.598202
189
0.598175
349
0.598149
294
0.598122
294
0.598095
154
0.598068
231
0.598042
299
0.598015
316
0.597988
274
0.597961
229
0.597935
336
0.597908
275
0.597881
369
0.597855
144
0.597828
198
0.597801
265
0.597774
279
0.597748
212
0.597721
257
0.597694
271
0.597668
201
0.597641
261
0.597614
175
0.597588
176
0.597561
246
0.597534
196
0.597508
155
0.597481
185
0.597454
273
0.597428
202
0.597401
201
0.597374
192
0.597348
194
0.597321
148
0.597294
178
0.597268
200
0.597241
166
0.597215
216
0.597188
111
0.597161
106
0.597135
228
0.597108
152
0.597081
182
0.597055
212
0.597028
159
0.597002
109
0.596975
178
0.596948
266
0.596922
75
0.596895
223
0.596869
127
0.596842
120
0.596816
179
0.596789
220
0.596762
183
0.596736
178
0.596709
208
0.596683
204
0.596656
145
0.59663
74
0.596603
211
0.596577
185
0.59655
100
0.596523
149
0.596497
50
0.59647
182
0.596444
176
0.596417
120
0.596391
120
0.596364
196
0.596338
121
0.596311
54
0.596285
89
0.596258
119
0.596232
108
0.596205
114
0.596179
103
0.596152
122
0.596126
194
0.596099
123
0.596073
74
0.596046
99
0.59602
77
0.595993
262
0.595967
171
0.595941
91
0.595914
154
0.595888
138
0.595861
153
0.595835
176
0.595808
150
0.595782
131
0.595755
125
0.595729
160
0.595703
66
0.595676
32
0.59565
125
0.595623
65
0.595597
124
0.595571
201
0.595544
89
0.595518
86
0.595491
189
0.595465
147
0.595439
195
0.595412
114
0.595386
129
0.595359
43
0.595333
110
0.595307
84
0.59528
148
0.595254
79
0.595228
139
0.595201
43
0.595175
80
0.595148
182
0.595122
116
0.595096
86
0.595069
132
0.595043
53
0.595017
195
0.59499
101
0.594964
124
0.594938
176
0.594911
178
0.594885
36
0.594859
107
0.594833
77
0.594806
182
0.59478
241
0.594754
88
0.594727
159
0.594701
0
0.594675
137
0.594648
141
0.594622
41
0.594596
66
0.59457
3
0.594543
25
0.594517
65
0.594491
107
0.594465
27
0.594438
137
0.594412
125
0.594386
42
0.59436
85
0.594333
112
0.594307
70
0.594281
101
0.594255
144
0.594228
135
0.594202
24
0.594176
112
0.59415
82
0.594123
end of experiment
